Tuesday, December 15, 2015

John Morris Scientiffic distribution of Kurt J. Lesker's ALD 150LX


In this chamber cross section you can see how the Kurt J. Lesker engineers has solved the problem of protecting the windows for the elipsometer bz integrating a curtain gas distribution plate in the top chamber lid.

 


Overview of this rather compact PEALD chamber. Many other has considerably bigger chambers that then also does not include an in-situ elipsometer.