John Morris Scientiffic distribution of Kurt J. Lesker's ALD 150LX

Here is some updates on the Kur J. Lesker´s PEALD Tool distributed by John Morris Scientific. Kurt J. Lesker's Atomic Layer Deposition system, the ALD 150LX, can operate as a stand-alone or fully integrated cluster tool system. Typical applications include Nanofabrication, Microelectronics, Optics, MEMS, Semiconductor, Photovoltaics, Photonics, Catalysis & Fuel Cells, Wear Resistance and OLED/Organic electronics.

In this chamber cross section you can see how the Kurt J. Lesker engineers has solved the problem of protecting the windows for the elipsometer bz integrating a curtain gas distribution plate in the top chamber lid.

 

Overview of this rather compact PEALD chamber. Many other has considerably bigger chambers that then also does not include an in-situ elipsometer.