Sunday, December 6, 2015

Russian Comberry is offering Combinatorial ALD development from Intermolecular HPC platform

Comberry, a Russian based joint venture with Intermolecular that started in 2013 is offering combinatorial materials development on one of the coolest ALD tools ever built - The Tempus AP-30 Vacuum Cluster. This tool is part of a large HPC platform including also PVD, CVD and wet chemistry.

Tempus® AP-30 Vacuum Cluster Module

This is the main module that utilizes wafers up to 300 mm in diameter. It is equipped with several (up to 5) ALD and PVD chambers as well as pre-clean and degassing modules and allows for fast deposition of various, isolated, thin-film samples by ALD and PVD methods without interrupting vacuum between technological processes.


Vacuum cluster module Tempus® AP-30

Comberry promotional video in Russian with English subtitles.

Comberry (Comberry, LLC), a Technology Company

 Comberry was established, by the Nanocenters of Dubna, Ulyanovsk and Saransk jointly with Intermolecular Inc., in October 2013 Intermolecular, Inc.

- applied research in the field of multifunctional thin-film coatings for various materials.

Comberry mission: to provide innovative Russian companies with technological development capabilities, poised to allow them to become successful producers of high-tech products.

Joint development projects make it possible for Comberry’s customers to increase the efficiency of applied research and create large numbers of intellectual property objects while reducing the time to market for new products

First stage projects:
  • Transparent Conductive Oxides
  • Electrochromic devices
  • Flexible, thin-film, copper-indium-gallium selenide solar cells (CIGS)

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