Sunday, December 20, 2015

Essay on the history of ALD - Molecular Layering

As Riikka just announced - Now it is here the Essay on the history of creation and development of the molecular layering technique (ML) and later known as atomic layer deposition (ALD). We´re collecting contributions to make it an Open Access and are short of $1,000 of the total $3,000 needed - please contact either me or Riikka Puurunen if you would like to contribute!


Prof. V.B. Aleskovskii and his student S.I. Kol’tsov

From V. B. Aleskovskii's “Framework” Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition

Anatolii A. Malygin, Victor E. Drozd, Anatolii A. Malkov and Vladimir M. Smirnov

Chemical Vapor Deposition, Volume 21, Issue 10-11-12, pages 216–240, December 2015,
DOI: 10.1002/cvde.201502013

Abstract: This essay is dedicated to the history of creation and development of the molecular layering technique (ML) which, in the modern community of non-Russian scientists, is commonly referred to as atomic layer deposition (ALD). Basic research in the field of chemical transformations of solid surfaces using the ML method in the light of the “framework” hypothesis proposed by V. B. Aleskovskii in 1952 is discussed. A number of questions raised by international scientists including those involved in the Virtual Project on the History of ALD (VPHA, 2013), and scientists from conferences in Helsinki (Finland, May 2014.), Kyoto (Japan, June 2014), and personal communications amongst peers are addressed. For the first time in English, this article provides information about V. B. Aleskovskii and S. I. Kol'tsov who are closely associated with development of the ML technique in the Soviet Union. This paper also informs the scientific community about research groups currently engaged in ML research in Russia and introduces the scientific school of “Chemistry of highly organized substances”, founded and supervised by V. B. Aleskovskii.
 
The authors express their deep gratitude to all the colleagues who initiated the writing of this review, particularly R. Puurunen and A. Abdulagatov. Special thanks to A. Abdulagatov for his valuable suggestions that helped strengthen the content of this article. The topic suggestions that have been sent to us by our colleagues from different countries have allowed us to more clearly define the structure and content of this article and we have tried our best to cover them all in detail. Great thanks to Puurunen Riikka (Finland), Sundqvist Jonas (Sweden), Pedersen Henrik (Sweden), Koshtyal Yury (Russia), van Ommen, J. Ruud, (the Netherlands). We would like to acknowledge the Russian science Foundation for partial financial support (contract No. 14-13-00597).