Interplay between oxygen defects and dopants: effect on structure and performance of HfO2-based ferroelectrics
Monica Materano et alInorg. Chem. Front., 2021, Advance Article https://doi.org/10.1039/D1QI00167A
How it is done - Here a cool video of a BENEQ P800 coating 300 mm showerhead plates for some advanced semiconductor wafer processing equipment.
BENEQ has freshened up its true ALD workhorse the P800 Batch reactor, which probably has the biggest load size in the industry.
PDF Product description for download: LINK
UK ALD and CVD Precursor supplier Pegasus Chemicals announce a new supply site in Europe in Värmdö, Sweden Pegasus Chemicals AB thru a long-term collaboration with Fab Support AB - the biggest supplier of CVD and ALD precursor in North Europe. The location is very close to BALD Engineering HQ also in Värmdö! Welcome to Sweden and Värmdö in the Stockholm Archipelago!
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• Order intake grew by 48,4% and was €40,9M (€27,5M)• Turnover grew by 38,6% and was €37,6M (€27,1M)• Operating profit was €0,9M (€-0,3M), which is 2,5% (-1,1%) of the turnover
ASM International recently acknowledged that ALD High-k/Metal Gate (HKMG) is finally in high volume production for DRAM (LINK). Now Samsung confirms that. This is a small victory for all people working on this process for such a long time. My first tool ownership when I moved to Germany and started at Infineon was an ASM Polygon 200 mm cluster with a Pulsar 2000 chamber running HfO2, TiN, TiHfN, TiAlN, Al2O3, and my not fully understood HfN ALD process and a Poly chamber that I never really cared too much about. Press release below - and now do the maths - how big this business is once rolled out for all DRAM technologies to come - yeah $$$, many tulips indeed.
We did not want to steal the thunder from our good Irish friends and St. Patrick Day we wish you all a healthy recovery today and breakfast for Champions. Yesterday we remembered our trip to Dublin and launching our proprietary technology, APS - ALE Pitch Splitting, for the first time to a bigger audience. Since then a lot of things has happened at AlixLabs AB in Lund, Sweden:
ALE Pitch Splitting (APS) taking place at the Lund Nano Lab exhibition stand in the ALD Ireland 2016 Industry Exhibition.
Video from presentation invited given by Dr. Dmitry Suyatin LINK. Staff Engineer at Lund Nano Lab and CTO of AlixLabs AB and on the Scientific Committee of AVS ALE.
Hey ALD Folks The Critical Materials Conference CMC2021, 14-15 April is coming up with some really powerful guest that will give you deep insights beyond the typical ALD conference offering on topics lie the semiconductor and global economics, Logic Foundry High Volume Manufacturing, Cost of Quality, Metrology and Big Data Machine Learning and Data Crunching for Plasma ALD.
As a bonus the 1st day we will have a virtual round table discussion on Materials Roadmaping in the industry. All participants are welcome to join.