Friday, June 10, 2022
Atomic Layer Deposition Expected to Grow to Meet Demand for More-than-Moore Devices and Applications
Tuesday, April 5, 2022
Using Vapor Phase Infiltration for Fabricating Membranes with David Bergsman – ALD Stories Ep 11
Innovative Spatial ALD system at the LZH can precisely coat complex-shaped optics
Thursday, March 10, 2022
Beneq fulfills customer demand for tailored ALD equipment services and support with BeneqCareTM
Tuesday, December 7, 2021
Beneq unveils two new ALD products for 300mm and compound semiconductor device fabrication respectively
Friday, November 19, 2021
How Did Plasmas Change ALD? - w/ Erwin Kessels (ALD Stories Ep 8)
Thursday, September 30, 2021
ALD Stories Ep 6 - ALD Precursor Design for Hard to Deposit Metals with Prof. Chuck Winter
Friday, September 3, 2021
The world’s largest ALD system - The BENEQ P1500 is here!
Wednesday, July 7, 2021
Beneq Product Event 2021 Full Video from the ALD/AVS 2021 Conference.
Thursday, April 15, 2021
BENEQ P800 coating batches of 300 mm showerhead plates for advanced semiconductor wafer processing equipment
How it is done - Here a cool video of a BENEQ P800 coating 300 mm showerhead plates for some advanced semiconductor wafer processing equipment.
Friday, April 9, 2021
BENEQ P800 Upgrade - Proven Batch ALD for High Volume Production
BENEQ has freshened up its true ALD workhorse the P800 Batch reactor, which probably has the biggest load size in the industry.
PDF Product description for download: LINK
Tuesday, March 9, 2021
ALD Stories podcast with Dr. Katja Väyrynen, Process Development Engineer at Beneq
Tuesday, January 19, 2021
Webinar - Enhancing Yield by Minimizing Contamination with Beneq ALD coating solutions
- Common issues of metal or particle contamination on critical chamber components
- Common coating methods against corrosion, and how they compare
- What properties to look for e.g. purity, uniformity, when evaluating the optimal protective coating solution
- Unique benefits of ALD coatings with Al2O3 and Y2O3
- Working with your OEM partner to design, test and implement an ALD coating solution for your equipment
Thursday, December 17, 2020
Beneq completes new clean room facility
Built with the latest cleanroom design and construction technology, the new facility adds approximately 350 square meters of ISO 7 cleanroom floor space at Beneq's headquarters. It will be used for product and process development, equipment assembly, prototyping, and testing services.
Thursday, December 10, 2020
ALD Webinar - The Ultimate Anti-Corrosion Coating Solution presented by Beneq
- Common issues of metal or particle contamination for critical chamber components
- Common coating methods to protect against corrosion, and how they compare
- What properties to look for – e.g. high purity and uniformity – when evaluating the optimal protective coating solution
- Unique benefits of ALD coatings with Al2O3 and Y2O3
- How to work with your OEM partner to design, test and implement an ALD coating solution for your equipment
Agenda and Speaker Information
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Tuesday, November 10, 2020
ALD and Nanotubes on Beneq ALD Stories
Thursday, November 5, 2020
Improving Curved uOLED encapsulation with ALD
Friday, October 16, 2020
ALD Stories by Beneq - Meet Professor Riikka Puurunen of Aalto University, Finland
Tuesday, September 22, 2020
ALD Stories - the untold stories of atomic layer deposition and the people behind the technology
Beneq launch ALD Podcast - Welcome to ALD Stories, a series of conversations where we share the untold stories of atomic layer deposition and the people behind the technology.
In the first episode, we are joined by Patrick Gonzalez an expert in high-performance thin films. We discuss about using spatial ALD on electrochromic windows for environmental and cooling cost benefits.
Follow ALD Stories on Spotify | Google Podcasts | Apple Podcasts | YouTube
Why Beneq created this podcast
Today there are over 60,000 patents worldwide involving Atomic Layer Deposition. However, despite the vast amount of research and development there are only a handful of public conferences where we can meet our fellow researchers and hear more about the work they have done.