Friday, June 2, 2023

Finnish ALD equipment manufacturer Beneq has entered a partnership with Lung Pien Vacuum Industry Co., Ltd. in Taiwan.

Finnish ALD equipment manufacturer Beneq has partnered with Taiwan's Lung Pien Vacuum Industry to promote ALD technology for optical applications. They held a seminar to exchange knowledge and explore ALD solutions for mass production challenges. ALD is a process that deposits atomic thin films with advantages like large-area coverage and precise film thickness control. Beneq, a global leader in ALD equipment, introduced AtomGrassTM ALD, a wide-angle broadband anti-reflective coating. Lung Pien will provide Beneq's equipment and services to its optics customers in the Asia-Pacific region. The partnership aims to actively promote ALD coating technology for high-end curved lenses in Taiwan's optical market.

Finnish ALD equipment manufacturer Beneq has formed a partnership with Lung Pien Vacuum Industry, a prominent vacuum coating equipment manufacturer based in Taiwan. The collaboration aims to promote ALD technology for emerging optical applications, such as camera lenses for mobile phones and automobiles. In April, the two companies organized an "ALD Optical Coating" seminar in Taiwan, inviting major optical manufacturers to exchange knowledge and explore ALD solutions for mass production challenges. ALD is a deposition process that involves the formation of self-limited reactions between precursor gases and a substrate surface, resulting in atomic thin films with advantages like large-area coverage, high step coverage, low-temperature processing, and precise film thickness control.


Peter Hsieh (left standing), Beneq’s Advanced ALD Sales Director, and Kalle Niiranen (right standing), Technical Sales Manager, hosting the ALD Optical Coating seminar on the 20th of April in Taichung, Taiwan.

Beneq has been a pioneer in industrial ALD production since 1984 and has established itself as a global leader in ALD equipment manufacturing. The company offers a wide range of technical products and R&D services, with a focus on finding industrial ALD solutions through collaboration and co-development. Beneq recently introduced AtomGrassTM ALD, an innovative wide-angle broadband anti-reflective (AR) coating. This solution provides exceptional anti-reflective properties with less than 0.07% average reflectance across a wide wavelength range and significantly improves performance at high angles of incidence.

According to Peter Hsieh, Sales Director of Beneq's Advanced ALD Business Unit, the demand for ALD is increasing in the nano-processes of the integrated circuit industry. ALD has replaced traditional methods like CVD and PVD for many key thin-film processes. Hsieh believes that ALD's development is now closer to industrial-grade 12-inch mass production equipment, opening up excellent application opportunities in various fields, including optoelectronics, automotive, medical materials, and more.

Lung Pien Vacuum Industry, founded in 1991, has a longstanding relationship with the optical industry. The company offers a comprehensive range of services, including product design, development, equipment manufacturing, production planning, operator training, and process design consulting. While Lung Pien primarily focuses on vacuum evaporation and sputtering equipment manufacturing, thin film process technology services, and other related products, their partnership with Beneq will enable them to provide Beneq's ALD equipment and services to their extensive network of optics customers in the Asia-Pacific region. The collaboration between Beneq and Lung Pien aims to actively promote ALD coating technology for high-end curved lenses in Taiwan's optical market, leveraging ALD's ability to provide uniform conformal thin film layers for complex structures.

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