Wednesday, January 23, 2019

Strem Chemicals’ offers new La-FMD ALD precursor for future leading edge logic and memory products

Strem Chemicals’ offering of La-FMD is one of the most promising metal-amidinate ALD precursors for lanthanum (La) based ALD thin-films which are potentially strong candidates for high-k gate dielectric in the next generation of CMOS technology.

Rare earth elements have entered high volume manufacturing for advanced logic devices since the 32 nm node (IBM, Samsung and Globalfoundries – Chipworks 2010). Especially for Lanthanum (La) — the eponym of the lanthanide series in the periodic table has been implemented as a dopant in the high-k metal gate stack. Lanthanum oxide (La2O3, dielectric constant ~ 27), for example, has been explored for two decades as a high-k gate dielectric for the replacement of conventional silicon dioxide (SiO2) gate dielectric in the next generation transistors in logic as well as in dynamic random access memories (DRAMs).
Keyword segmentation of patent applications the last 20 years for Lanthanum and “Atomic Layer Deposition” [Patbase search 15 November 2018]

Atomic layer deposition is the most promising method for growing ultra-thin-films of La based gate dielectrics and has therefore been under extensive research and filing of patent applications in the last 20 years. The R&D effort has been focused on fields relating to dielectric and high-k dielectric applications in the semiconductor industry (see keyword segmentation above). The atomic layer-by-layer film growth facilitated by self-limiting surface reactions in ALD provides atomically precise film-thickness control, good uniformity across a large area substrate, and excellent conformality in case of high aspect ratio structures like modern FinFETs and memory capacitor type pillar structures. However, to work flawlessly it requires the ALD precursors that have specific properties (LINK): 

1. Sufficiently volatile (at least ~ 0.1 Torr equilibrium vapor pressure at a temperature at which they do not decompose thermally).

2. Rapidly vaporizing and at a reproducible rate (conditions that are usually met for liquid precursors, but not for solids).

3. Not self-reacting or decomposing on the surface or in the gas phase (for self-terminating surface reactions).

4. Highly reactive with the other reactant previously attached to the surface, which results in relatively fast kinetics and thus lower ALD temperatures and cycle times.

5. Volatile byproducts that can be easily purged in order to prepare for the subsequent half-cycle.

6. Non-corrosive byproducts to prevent non-uniformities due to film etching and corrosion of the tool.
In 2007, Intel Corporation incorporated HfO2 into high-k gate dielectric stack at 45 nm technology node. However, pure HfO2 suffers from low-k interface layer problem with Si, limiting lower equivalent oxide thickness (EOT) values. It also readily crystallizes at temperatures as low as ~500°C. Therefore, amorphous dielectrics with high thermal stability are still sought after for no intrinsic defects (e.g. grain boundaries), provided they still offer the advantages of HfO2, such as high dielectric constant, wide band-gap, and low leakage current. Lanthanum-based ternary oxides, such as lanthanum scandate (LaScO3) and lanthanum lutetium oxide (LaLuO3), deposited by ALD process involving metal amidinate precursors reportedly exhibit desirable structural and electrical properties. In fact LaLuO3 is potentially the best amorphous phase gate dielectric with dielectric constant k~32. It doesn’t form low-k interfacial layers with Si which enables effective oxide thickness (EOT) values < 1 nm with significantly low leakage current. Another factor contributing to the low leakage current across ALD grown thin LaLuO3 gate dielectric is the large band-offset (2.1 eV) with respect to Si; the symmetric conduction and valence band offsets result into equal leakage currents in electron driven NMOSFETs and hole driven PMOSFETs. It stays amorphous and doesn’t form alloys with Si or Ge after respective source/drain activation anneals.  

As a very recent example of an actual high aspect ratio application on 300 mm wafers requiring all ALD precursor characteristics described above (1 to 6) we can see the paper that Imec presented at this famous IEDM conference, on using a LaSiOx layer as a dipole inserted in the HKMG stack. Imec succeeded in stacking the complete FinFET front end module on top of a "standard" bulk silicon FinFET module demonstrating also good threshold voltage tuning, reliability and low-temperature performance. Presumably it has most likely been deposited by an ALD process since it will have to conformally coat the fins and ensure precise thickness control and uniformity : IEDM2018 Paper #7.1, “First Demonstration of 3D Stacked FinFETs at a 45nm Fin Pitch and 110nm Gate Pitch Technology on 300mm Wafers,” A. Vandooren et al, Imec [LINK].
As in this case and many more, the stringent qualifications for ALD precursors put them in the category of high quality specialty chemicals — the performance or function specific materials or molecules of choice. The deposited film properties are strongly influenced by the physical and chemical properties of a single molecule or a formulated mixture of molecules as well as its chemical composition. Therefore, it puts a lot of pressure on the manufacturer and supplier of the high purity specialty chemicals in terms of quality, purity, documentation procedures, customer service etc.
Strem Chemicals, Inc. headquartered in Newburyport, Massachusetts, USA is an employee-owned fine chemicals supplier. They’ve been manufacturing and marketing high-quality specialty chemicals for more than half-a-century. Strem provides custom synthesis and FDA inspected current good manufacturing practice (cGMP) services to its clients, which include academia, industry, and government R&D labs. What helps to distinguish Strem from the other chemicals suppliers is their commitment to quality products. In fact, Strem has been listing color and form, a key quality indicator, for every product since their first catalog. Strem is an ISO 9001:2015 Certified company.  For additional details about the more than 5,000 products offered by Strem, visit their website,

Tris(N,N'-di-i-propylformamidinato)lanthanum(III), (99.999+%-La) La-FMD is one of the metal amidinate precursors in Strem’s product catalog (catalog number 57-1200, CAS number 1034537-36-4) for La ALD. The material is a white to off-white powder. The chemical formula and the molecular weight of La-FMD are C21H45LaN6 and 520.53, respectively. Rohm and Haas Electronic Materials LLC (subsequently Dow Chemical) reports La-FMD as the most volatile La precursor known so far. The vapor pressure at a given temperature imparted by La-FMD is higher than that by La(Cp)3 and La(thd)3. Moreover, Roy G. Gordon from Harvard University reports that the amidinate precursors are thermally more stable than their amide counterparts because of the chelating amidinate ligand and the absence of M-C bond. La amidinates are highly reactive with Si-H bonds yielding much smaller surface saturation time and in turn quick self-termination of ALD half-reaction; thus shortening the ALD cycle time. Also, an excellent surface coverage is provided by La amidinate precursors on Hydrogen terminated Si. 

Promotional Blog for Strem Chemicals, Inc.
Researched, produced & written by BALD Engineering AB, Stockholm, 2019-01-23
Abhishekkumar Thakur, Jonas Sundqvist


  1. ?m impressed, I must say. Really rarely do I encounter a blog that?s both educative and entertaining, and let me tell you, you have hit the nail on the head. Your idea is outstanding; the issue is something that not enough people are speaking intelligently about. I am very happy that I stumbled across this in my search for something relating to this.Get Best Flame retardant textiles from in all over the world.

  2. Great job for publishing such a nice article. Your article isn’t only useful but it is additionally really informative. Thank you because you have been willing to share information with us. Buy Online Research Laboratory Chemicals USA

  3. Welcome to research chemicals supplier, we are one of the leading research chemical companies in USA and the world in general. We provide our customers with just the best products, high quality, and laboratory tested. We also sell at very affordable prices, we offer discounts of almost 50% that's why we are very different from other research companies, and we also always advise our customers to start ordering a small quantity, test for themselves before making a huge order, this because we are very confident about our chemicals, so we let our products talk for us. More than 98% of our customers who started with very small orders are now making huge orders. Come and join our happy customers and have a taste of our excellent before and after-sales services, we are just the best you can ever think of, hurry up today and be part of our happy family. Most important, we also ship worldwide, so you are not left out because our products reach every corner of the universe. We have agencies everywhere, so are always just around you, that's why our shipping is very fast, confident, reliable, discreet and convenient. Have no worries about the custom services in your country, we know just how to bypass all customers. Thanks so much for your time while waiting for your order, buy today and get a 20% discount
    buy liquid ketamine online

  4. Blueberry Diesel. Grand Daddy Purp. Sour Tangie. Platinum OG. OG Kush. Cookies. Sherbert. LIME OG. Candyland. Durban Poison. Sour Diesel. OG Cookies
    buy tko extracts online
    tko extracts flavors
    tko oil
    buy stiiizy pods online
    cereal carts for sale
    buy stiiizy pods online
    white runtz carts

  5. Thanks for taking the time to discuss that, I feel strongly about this and so really like getting to know more on this kind of field. Do you mind updating your blog post with additional insight? It should be really useful for all of us. get cheap likes

  6. Unlock the mysteries of your brain with the finest types of [url=]magic mushrooms[/url] from [url][/url] – your onlin e source of [url=]psychedelics drugs[/url] in USA.
    This gift of nature contains lemon tek, a [url=]psychedelic[/url] compound with ordering [url=]shrooms onlin[/url]e. [url=] magic mushrooms[/url] onlin e which will alter your thoughts and emotions
    alongside shrooms tea . You’ll experience a change in the world around you on how to order how to order ibogaine onlin e and [url=] DMT[/url] when like halos around lights
    and objects.
    [url=]hallucinogenic drugs[/url]
    [url=]psychedelic drugs[/url]
    [url=]trippy websites[/url]
    [url=]lsd pills[/url]
    [url=]buy mdma[/url]
    [url=]buy 1p-lsd[/url]
    [url=]buy magic mushroom[/url]
    [url=]buy magic mushrooms online[/url]
    [url=]magic mushrooms for sale[/url]
    [url=]tryptamine 5-meo dmt for sale[/url]
    [url=]mdma for sale[/url]
    [url=]dmt for sale[/url]
    [url=https://www.psychedelicsonline-psilocybin mushrooms[/url]

  7. Ecstatic Psychedelic is an international psychedelic shop which operates world wide.
    Our main branch is based in USA where we carry out most of our operations. Delivery is done within the USA, CANADA and EUROPE with no hassles.
    Visit our shop now and get best deals.
    buy dmt online
    buy mdma online
    dmt trip
    what is dmt
    how to buy lsd online
    buy Penis envy
    where to buy Penis envy shrooms
    penis envy mushrooms
    golden teacher mushrooms


  8. Best Grade Health Care Products Available Online. Genuine and 100% Guarantee on all orders you place. We Have the Best you
    will come across On line. We As well Provide Tracking , on Packages as they are being sent and also Tracking on recent
    orders .
    We have variety of Pain killers for sale at affordable prices.

    We are the best suppliers of pain medications and research chemicals .our prices are affordable .
    For more details contact our website through any of the details provided below
    Medication Kings
    Website ...
    Emails ....
    Phone .... +1 (503) 985-6723

  9. This comment has been removed by the author.


  10. Era/
    Pax Era
    pax era pods
    smart carts
    dank vapes

  11. "Model: MZ00018£¬
    CAS No.: 634-93-5 MF: C6H4Cl3N
    EINECS No.: 211-219-8
    Place of Origin: China
    Type: indole derivatives
    Grade Standard: High quality
    Purity: 99.0% Min
    Assay: 99%-101% Appearance: White powder
    Solubility: Solubility in water
    Water: 1.0% max
    Sulfated Ash: 0.5% Max
    Heavy Metals: 10 ppm Max
    Test Method: H-NMR
    Total Impurity: 0.5% Max
    Application: indole" 2,4,6-trichloraniline £¬

  12. Buy Adderall online at your door step from one & only trusted pharma in this ERA. Buying Adderall 30mg with Credit card.

  13. I have read a few of the articles on your now, and I really like your style of blogging. I added it to my favorites blog site list and will be checking back soon. Please check out my site as well and let me know what you think.

  14. Great post, very nice content. Look forward for more articles like this.
    Get quality bespoke packaging boxes printing , Custom Boxes UK, wholesale printed boxes for other CBD products and more for any product you need.

  15. Stickers2go is the UK’s no 1 manufacturer of custom stickers printing and printed labels Order custom stickers and labels, in ANY shape and size, powered sticker printing for industry-leading quality.Order now to get discount on bespoke stickers printing

  16. Stickers2go is the UK’s no 1 manufacturer of custom stickers printing and printed labels Order custom stickers and labels, in ANY shape and size, powered sticker printing for industry-leading quality. Order now to get discount on bespoke stickers printing

  17. Quality Packaging Solutions, the name itself is self-evident of our quick and efficient services. We at Quality Packaging Solutions offer a wide variety of customized packaging options to our customers. You can get your custom cigar boxes at Quality Packaging Solutions in a cost-effective manner. We specialize in retail as well as wholesale Custom Packaging.

  18. You can get your Custom Cannabis Boxes at Quality Packaging Solutions in a cost-effective offers FREE shipping around the globe. Our standard turnaround is 10-12 Business Days with FREE shipping. We also offer Rush Services with 6-8 Business Days plan where up to 25% expedite may be applicable.

  19. PackagingPapa is the famous name of the packaging industry. The Custom Biscotti Packaging Boxes are designed by highly qualified manufacturers working for Packaging PAPA that is the most demanding company.

  20. The custom boxes are as extraordinary as they are unique and work wonders for businesses Packaging boxes is aiming at creating boxes from extremely biodegradable material. They're taking small stores to local domination, to national level brands to multi-national organization.Marijuana soap boxes

  21. Custom boxes is the U.S manufacturer of and printed labels Order custom boxes and labels, in ANY shape and size, powered printing for industry-leading quality. Plus there's free delivery after you order, and our guarantee to beat any like-for-like quote for printed boxes and labels.

  22. What might be said about food? A lot of our food is chemically treated with the goal that it is more productive to the organizations. tadalafil powder manufacturer

  23. Great post i must say and thanks for the information. Education is definitely a sticky subject. However, is still among the leading topics of our time. I appreciate your post and look forward to more. research chemical vendors

  24. our Post is very informative. If you are looking for the new CBD Sample Boxes then you must get to our company site Custom Boxes Printing and check out new box styles to pack your products in them.

  25. Your article is very beneficial for us.If you are looking for new boxes like vape subscription box then you can visit our website .Our boxes have good quality and you can order our boxes for packing your products.

  26. Thanks for the tips and information..i really appreciate it.. Research chemicals for sale

  27. Your subject is very helpful for us.If you are looking for great quality boxes like rectangle gift boxes with Lids you can visit our website for this.Our boxes have their name in the world you can order them for packing your beautiful products.

  28. Custom Printing Services it is the best printing services and the follow my website new technology Buy Packaging Boxes Buy Packaging Boxes printing in the best works try the link open. thanks

  29. bespoke packaging boxes At Bespoke Packaging UK we strongly believe in the interests of bespoke packaging, which has multiple benefits. Over the last few decades, we have built up vast experience in producing bespoke packaging for a vast range of items.

  30. bespoke packaging boxes At Bespoke Packaging UK we strongly believe in the interests of bespoke packaging, which has multiple benefits.


  31. I wish more authors of this type of conent would take the you did to research and write so well Write My Assignments For Me . I am very impressed with your vision and insight.

  32. I definitely loved every little bit of it and i also have you book-marked to check out new information in your site.cosmetic packaging | cosmetic packaging

  33. Great post I like it very much keep up the good work.
    USA Custom Boxes
    plain Gable boxes

  34. This content is simply exciting and creative. I have been deciding on a institutional move and this has helped me with one aspect. Buy gelly tabs online

  35. This is really a nice and informative, containing all information and also has a great impact on the new technology. Check it out here: marijuana packaging

  36. The first thing that I must say is that you have a unique writing style. An interactive cum interesting style of explaining things. One thing is for sure that these tips are simply great!
    anti theft backpack

  37. Decent to be going to your web journal once more, it has been months for me. Well, this article that I've been waited for so long. I was searching for a good idea about powder coat oven which I found here. Thank you so much.

  38. I feel really happy to have seen your webpage and look forward to so many more entertaining times reading here. Thanks once more for all the details.wholesale bottle neckers uk | wholesale bottle neckers uk