Wednesday, July 1, 2015

Kurt J. Lesker introduces new R&D Platform for organic material deposition, ALD and PEALD

Kurt J.Lesker's most affordable organic material deposition system platform, designed specifically with the entry to mid-level user in mind. Standard configurations compatible with up to 100mm x 100mm square or 150mm diameter substrates, up to 350°C heating and cooling, glove box option available.

  • Designed to accommodate specific organic and inorganic thin film applications such as, OLED Displays, Lighting, Organic Photovoltaics and Electronics.
  • Offers both organic and metal deposition capabilities in a single chamber.
  • Recipe driven computer system control with data logging option available.
  • Field tested and proven design.

Glovebox Interfaced System: Incorporates a sliding front door with glove box interface flange and sliding rear door for unobstructed chamber access. Facilitates thermal and plasma enhanced atomic layer deposition techniques

Standard chambers are configured to allow up to:

(12) 1cc, 10cc, or 35cc plug-in low-temperature organic sources

(4) Thermal evaporation sources and pellet feeder option

- Personalised combinations available based on system platform

- Scroll type rough pumping; cryogenic high vacuum pumping

- Standard configurations compatible with up to 8" x 8" (200mm x 200mm) square substrates, up to 350°C heating, glove box, up to five mask storage shelves with motorised transfer, and wedge tool options

- Basic computer control with recipe and data logging options are available as well

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