Sunday, July 26, 2015

Growth in Plasma ALD publication for first half of 2015 reports that there is a clear increase in Plasma ALD publication in the first had of 2015 as compared to 2014 "Through the first six months of 2015, I have collected 112 PEALD publications. Compared to the 51 for this same time period in 2014, this represents a 120% growth. Exciting news for the PEALD community. Now I need to find the time to review them all and get them into the plasma ALD Publication Database."

This confirms the general trend seen that ALD is being used more and more for low thermal budget applications in patterning as well as BEOL and non-semiconductor fields. Also I have heard directly from ALD OEMs that the sales in PEALD has increased lately. Today most OEMs offer a PEALD chamber technology. 

Another clear sign that PEALD is coming strong is that there is actually an after market in converting thermal ALD chambers to PEALD. One such company is Meaglow that offer Plasma upgrades of PEALD chambers as well as complete conversion kits from thermal ALD to PEALD.

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