Plasma-ALD.com has completed their 2015 review and published all the interesting statistics. - very interesting stuff showing strong growth of Plasma ALD (PEALD).
"There was a lot of interesting plasma atomic layer deposition activities
during 2015. I have found 237 references utilizing PEALD in one form or
another that were accepted for publication during the year. That is a
63% increase over the 147 references found in 2014."
Top 3 is unchanged: South Korea, USA and Germany. Taiwan and The Netherlands moving up with a lot of publications in 2015.
Please go here to dig into the numbers: http://www.plasma-ald.com/
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