Atomic Layer Deposition at The CMC Conference, 5-6 May, Hillsboro, OR

For those of you that have a chance to attend the CMC Conference coming up in Hilsboro, 5-6th of May here is an updated List of Speakers. We are very happy to announce three key persons in from the ALD industry giving invited talks at this two day event  : 

• Jean-Marc Girard from Air Liquide
• S.I. Lee from Veeco
• David Thompson from Applied Materials

In addtion, a number of invited talks related to ALD by Industry Leaders & Experts:

• Rob Nine, Strategic Marketing - Pall Microelectronics 
• Jeff. Hemphill, Sr. Materials Engineer - Intel Corp.
• John Smythe, Ph.D., Advanced Technology Lead DMTS - MICRON Technologies
• Max Kelman, Ph.D., Sr. Technology Manager – Aixtron 
• Dan Alvarez, Ph.D., Chief Technical Officer - RASIRC

Check the schedule below for more details or go directly to the CMC Conference page here: http://cmcfabs.org/seminars/

Day 1, Session II:

Immediate Challenges of Materials & Manufacturing

Device and Application Trends	Jim Feldhan, President - SEMICO Research
Gas Market Dynamics - Helium, Neon, NF3	Bruce Adams, Sr. Technology Analyst - TECHCET
Neon Efficiency Improvement / Recycling	Gigaphoton
CMP Efficiency, Waste Handling Issues	Bassam Elkhatib - Texas Instruments
POUP strategies for Critical Materials	Rob Nine, Strategic Marketing - Pall Microelectronics
Intel - Requirements and Future Challenges for Cleaning	Jeff. Hemphill, Sr. Materials Engineer - Intel Corp.
ALD Precursor Development Challenges for HVM	Jean Marc Girard, Ph.D. Chief Technical Officer - AirLiquide
Low Temp Spatial ALD for Multiple Patterning Materials	S.I. Lee, Ph.D., Chief Technical Officer - Veeco

---

Day 2, Session III, 1/2 Day:

Emerging Materials Challenges

ALD/CVD Material & Equipment Market Trends	Jonas Sundqvist, Sr. Technology Analyst - TECHCET
The Future of Materials for Memory Applications	John Smythe, Ph.D., Advanced Technology Lead DMTS - MICRON Technologies
Agony in New Material Introductions - Minimizing and Correlating Variabilities	David Thompson, Ph.D., Advanced Technology Lead DMTS - MICRON Technologies
Alternate III/V Channel Material Challenges	Max Kelman, Ph.D., Sr. Technology Manager – Aixtron
Challenges Implementing Carbon NanoTubes CMOS fab	Rahul Sen, Ph.D., Materials Development - Nantero
Low Temp Nitride Source & Handling Hydrazine for ALD	Dan Alvarez, Ph.D., Chief Technical Officer - RASIRC