Here is an excellent interview with Dr. David Thompson, Senior Director, Center of Excellence in Chemistry, Applied Materials on the challenges of bringing new ALD Precursors to production. For those of you who still have the possibility there will be a opportunity to meet and talk to David Thompson at the CMC Conference 5-6th of May (see details below).
Controlling Variabilities When Integrating IC Fab Materials
By Ed Korczynski, Senior Technical Editor, SemiMD/Solid State Technology,
copyright ©2016 Extension Media
copyright ©2016 Extension Media
Semiconductor integrated circuit (IC) manufacturing has always relied
upon the supply of critical materials from a global supply chain. Now
that shrinks of IC feature sizes have begun to reach economic limits,
future functionality improvements in ICs are increasingly derived from
the use of new materials. The Critical Materials Conference 2016—to be
held May 5-6 in Hillsboro, Oregon (cmcfabs.org)—will explore best
practices in the integration of novel materials into manufacturing. Dr.
David Thompson, Senior Director, Center of Excellence in Chemistry, Applied Materials
will present on “Agony in New Material Introductions – minimizing and
correlating variabilities,” which he was willing to discuss in advance
with SemiMD.
The full interview by By Ed Korczynski, Senior Technical Editor, SemiMD/Solid State Technology and Co-CHair of The CMC Conferecne is published in SemiMD and can be found here: http://semimd.com/blog/2016/04/15/controlling-variabilities-when-integrating-ic-fab-materials/
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