UPDATE: Jusung Engineering launches SDP R2 Revolution-Rotation ALD System at SEMICON Korea

JUSUNG Engineering Co., Ltd., incorporated founded in 1995, is one of the leading equipment makers in global semiconductor, flat panel display and solar cell markets from South Korea. Today at SEMICON Korea Jusung announced a new cool ALD platform (Press release, Korean) and in English below (supplied by Jusung Engineering).

SDP R2(Revolution/Rotation Atomic Layer Deposition System), featuring entirely new concept chamber to realize high-quality film even at an ultra-low temperature (Picture from Jusung Engineering Korean Press release).

JUSUNG Engineering (Ticker 036930; CEO Chul Joo Hwang) will participate in the SEMICON Korea 2016, an international semiconductor equipment and material expo held in the Coex for three days starting from January 27th 2016 to showcase its next-generation semiconductor equipment.

JUSUNG plans to launch its state-of-the-art products including SDP R2(Revolution/Rotation Atomic Layer Deposition System), featuring entirely new concept chamber to realize high-quality film even at an ultra-low temperature.

 The SDP R2 is new concept equipment that enables revolution for the main disc and rotation for the water simultaneously in order to fulfill the demanding technical requirement in the multi-patterning process at the tech-migration which is at the verification test stage on the mass- production line of a customer.

The equipment allows film quality deposition without using plasma even at an ultra low temperature below 80℃, causing no damage to film quality at infrastructure, and enables the plasma function at the treatment process, realizing the merits of both thermal deposition and plasma deposition processes at the same time. Above all, the most notable feature of the equipment is the ability to control the uniformity of the deposition material in a 20nm or smaller micro semiconductor structure through revolution and rotation function, ensuring excellent film quality without regard to the complexity of the infrastructure.

Once the new concept technology is applied to mass-production, the application will be widely extended to processes such as next-generation memory semiconductor, DRAM and Flash thanks to improved semiconductor film quality profile along with reduced time requirement for deposition, leading to higher productivity as well as lower cost.

An officer from JUSUNG Engineering said, “We showcase new concept equipment that is optimized to the tech migration process at an event where you can see the recent technology trends in the semiconductor industry at a glance…We will do our utmost to keep our technology well ahead in the industry with new product development to overcome limitations of existing equipment for next-generation semiconductors.”