Wednesday, October 7, 2015

Atomic Layer Processing at SEMICON Europa 2015

Here are some ALD related pictures from SEMICON Europa in Dresden. Not only ALD since this year ALE and RIE was also a hot topic in the afternoon of the ALD Lab Dresden Symposium on Tuesday (see previous post). Biggest news here is that Oxford Instruments has released new innovative hardware for ALE!

Oxford Instruments releasing new innovative hardware for ALE (Atomic Layer Etching). Harm Knoops (right) and Andreas Stamm (left)

Assuming Oxford Instrument have big success with selling ALE hardware we will definitely start seeing an increase in ALE publications in the future and maybe the upward trend of ALD will follow or the technologies will merge into one for "Atomic Layer Processing" or like some of  us like to call it - ALX. This was actually the message from many of the presenter in the ALD Symposium (Prof. Bartha, Prof. Roozeboom, and Stephan Wege from Plasway), including this one from myself. The OEM market for ALX will definitely be very innovative and interesting in the years to come.

The Sentech stand a German OEM selling both Etch, PECVD and ALD / PEALD equipment together with very powerful in-situ ellipsometry metrology.

Nice to see that there is a lot of new activities in the European precursor supplier business. Here the team from EpiValence. EpiValence is focusing on working in collaboration with organisations looking for advanced chemicals and materials. Starting with research and development through to full scale up. You may also notice the close collaboration with iCAM (see their stand futher below)

A cross section of the popular Japanese ALD valves from KTZ SCT

Plasma Therm makes very technological advanced ICP RIE tools (Versaline) with lamp heated (!) chambers. Why these guys don´t make a PEALD chamber I don´t know - fast gas switching they do master for their Plasma wafer dicing process, which seems to be their cash cow.

Quick stop at the STREM  to talk to Jamal Belgacem about some need for new precursor and to pick up the latest catalogues for ALD precursors

I had a nice chat with Peter Barlow at iCAM - The Bubbler Maters from Wales - about building a new flexible solid evaporator for precursor screening.