Wednesday, April 20, 2016

Download presentations from The Surface Preparation and Cleaning Conference (SPCC) 2016

Here are a lot of interesting presentation available for free download: https://spcc2016.com/downloads/


The Surface Preparation and Cleaning Conference (SPCC) 2016

The Surface Preparation and Cleaning Conference (SPCC) is an annual event which brings together prominent researchers from the semiconductor industry and the university community to focus on developments and challenges in advanced wafer and mask cleaning and surface preparation technologies. 

Join industry experts from around the globe representing IC manufacturers, suppliers, and research organizations to present and discuss the industry’s best available data on wafer, mask and part cleaning technologies and solutions:
  • Wafer front-end
  • Wafer back-end
  • Post CMP
  • Packaging
  • Advanced mask
  • Equipment and parts
  • Environment, safety and health issues

My favorites:

INVITED: Electron beam generated plasmas: Ultra cold sources for low damage, atomic layer processing — Scott Walton, Naval Research Lab


Selectivity in Atomic Layer Etching Using Sequential, Self-Limiting Thermal Reactions — Steve George, Univ. of CO

Novel Reactive Chemistry Sources for Surface Passivation of Future Generation Channel Materials — Dan Alvarez, Rasirc

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