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According to the PEALD Database administrated by The Plasma ALD guy 2015 has seen a tremendous growth in PEALD Pulblications as compared to 2014. It will be interesting to see the break down to materials and equipment once 2015 comes to an end. check it out : plasma-ald.com
105% PEALD Publication Growth
"Through the first nine months of 2015, I have collected 172 PEALD publications. Compared to the 84 for this same time period in 2014, this represents a 105% growth. Exciting news for the PEALD community. Now I need to find the time to review them all and get them into the plasma ALD Publication Database."
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