Open Source Review : Nanoscale Structuring of Surfaces by Using Atomic Layer Deposition

To get a good overview on the most recent developments in ALD enabled patterning you should take a look at this open source review from Eduard-Zintl-Institut für Anorganische und Physikalische Chemie, Technische Universität Darmstadt.

Download PDF here: http://onlinelibrary.wiley.com/doi/10.1002/anie.201503680/pdf

The most intriguin example give is probably this one doing molecule templated ALD producing lateral CDs in the order of 2 nm - Cool!

Nanoscale Structuring of Surfaces by Using Atomic Layer Deposition

Nicolas Sobel and Christian Hess

5 November 2015, DOI: 10.1002/anie.201503680
 

Controlled structuring of surfaces is interesting for a wide variety of areas, including microelectronic device fabrication, optical devices, bio(sensing), (electro-, photo)catalysis, batteries, solar cells, fuel cells, and sorption. A unique feature of atomic layer deposition (ALD) is the possibility to form conformal uniform coatings on arbitrarily shaped materials with controlled atomic-scale thickness. In this Minireview, we discuss the potential of ALD for the nanoscale structuring of surfaces, highlighting its versatile application to structuring both planar substrates and powder materials. Recent progress in the application of ALD to porous substrates has even made the nanoscale structuring of high-surface-area materials now feasible, thereby enabling novel applications, such as those in the fields of catalysis and alternative energy.