SEMICONDUCTOR
- Patterning spacer (SiO, SiON, SiOC, SiN)
- Gate high-k (HfO)
- Capacitor high-k (ZrO)
- Diffusion barrier (TiN,TaN)
- Moisture barrier (AlO)
- ITO etching barrier (AlO)
- Transparent conducting oxide (ZnO, Al:MgO, SnMgO)
- AlO passivation for c-Si solar cell
- ZnOS buffer layer for CIGS thin film solar cell
Powder
- ALD coating on micro- and nanosized particles (Pt, Ru)
- Functional coating
- LiBS coating (AlO)
- Moisture barrier (AlO)
- Anti-corrosion coatings for metal
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