The tutorials for AVS ALD 2015 looks vey interesting indeed - word class ALD experts and speakers from Intel, University of Helsinki, SAFC, Samsung, IBM and Purdue University!
Tutorial Speakers & Topics
The Tutorial will be held after noon on Sunday, June 28, 2015 at the Portland Hilton. The registration fee will include breaks and course materials.
Schedule
11:30 a.m.- 12:30 p.m.
Registration
12:30p.m.- 1:15 p.m.
Patricio E Romero, Intel, “Early stage ALD and CVD precursor development at Intel”
1:15 p.m.- 2:00 p.m.
Markku Leskelä, University of Helsinki, Finland, “ALD Process Development: Solutions to Industrial Challenges”
2:00 p.m.- 2:15 p.m.
Break
2:15 p.m.- 3:00 p.m.
Ravi Kanjolia, SAFC Hitech, "Lab to Fab: Precursor Development for Semiconductor Applications"
3:00 p.m.- 3:45 p.m.
HanJin Lim, Samsung Electronics, “ALD Technologies and Applications in Semiconductor Device Fabrication”
3:45 p.m.- 4:30 p.m.
Theodorus Standaert, IBM, “Challenges in BEOL Technology and Opportunities for ALD Processing"
4:30 p.m.- 4:45 p.m.
Break
4:45 p.m.- 5:30 p.m.
Peide D. Ye, Purdue University, “ALD for Novel Device Technologies”
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