ISAC Research - South Korean ALD OEM

Today I came across a South Korean ALD OEM that I have not descovered previously. Possibly this company is well knwon elsewhere - ISAC Research. According to their web they supply a full range of ALD equipment covering all wafer sizes up to 300 mm, batch processing for CIGS and also powder processing.

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SEMICONDUCTOR  

• Patterning spacer (SiO, SiON, SiOC, SiN)  
• Gate high-k (HfO)
• Capacitor high-k (ZrO)
• Diffusion barrier (TiN,TaN)

OLED

• Moisture barrier (AlO)
• ITO etching barrier (AlO)
• Transparent conducting oxide (ZnO, Al:MgO, SnMgO)

PV

• AlO passivation for c-Si solar cell
• ZnOS buffer layer for CIGS thin film solar cell

MEMS/NEMS

Powder

• ALD coating on micro- and nanosized particles (Pt, Ru)
• Functional coating

Flexible

• LiBS coating (AlO)
• Moisture barrier (AlO)

Surface protection

• Anti-corrosion coatings for metal