Here are some interesting statements with respect for ALD from the latest Aixtron 4Q/2015 Earnings Call (2016-02-23):
"Demand for our power electronics equipment more than doubled to over €25 million last year. We also saw solid growth in our silicon semiconductor equipment business where revenues increased by 75% to just over €29 million. This was largely due to a strong demand for our ALD technology, which has become a key element of the DRAM production of our customer." Said Martin Goetzeler, CEO of Aixtron.
According to Bernd Schulte, COO: "For memory chip production, our QXP-8300 ALD deposition tool performs at the highest uptime levels in high volume manufacturing environment. It is production qualified by a major Korean producer with qualification ongoing at two other memory chip manufacturers."
I remember seeing the first PowerPoint version of this multi stage chamber and it impressed me a lot so I am happy to read that they have had success with it in the Korean DRAM industry. It is also interesting to see that Aixtron has integrated some of their technologies coming from their MOCVD reactors like the TriJet Vaporizer and the CCS (Shower head).
Full details on the here
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