Wednesday, September 30, 2015

Ruthenium may take over from Copper for advanced Interconencts according to Imec

Here is an interesting report by Jeff Dorsch from SEMI’s annual Strategic Materials Conference, that was held September 22-23, at the Computer History Museum in Mountain View, California.

One of the most interesting things i find i that ruthenium is back on the table, at least according to Imecs Christoph Adelmann who presented that ruthenium my take over from copper in advanced interconnects one day. This is not the first time ruthenium is announced entering into semiconductor manufacturing. Many ruthenium R&D programs has started and eneded many times the last decade at IDMs, OEMs and materials suppliers especially at DRAM manufacturers looking to integrate SrTiO3 super high-k using ruthenium based electrodes in the capacitor module. So it is time again to have a look at the Ruthenium price development at Johnson Matthey.

Today the ruthenium price is actually as low (~150$/Oz.) as is was the first time I got involved in ruthenium ALD/CVD development in 2003 at Infineon. It will be very interesting to follow ruthenium this time  and if it would actually enter BEOL metallization the price should go up considerably since it does come again many times an an advance interconnect chip 12-16 depending on the design but not all layers may have to contain ruthenium so the upper layer will stay copper for a long time to come. Anotehr driver for sure is if ruthenium were to be used in 3D-stacing TSV technology - Maybe a good timing now to invest in some ruthenium!


Pt & Ru price chart generated at http://www.platinum.matthey.com/prices



Platinum, RutheniumMonthly Average prices between 30 Sep 2000 and 30 Sep 2015JM Base Price $/0zPlatinum average: $1,165.38, Ruthenium average: $150.59 - See more at: http://www.platinum.matthey.com/prices/price-charts#sthash.GMP3wwcI.dpuf


Platinum, RutheniumMonthly Average prices between 30 Sep 2000 and 30 Sep 2015JM Base Price $/0zPlatinum average: $1,165.38, Ruthenium average: $150.59 - See more at: http://www.platinum.matthey.com/prices/price-charts#sthash.GMP3wwcI.dpuf
Platinum, RutheniumMonthly Average prices between 30 Sep 2000 and 30 Sep 2015JM Base Price $/0zPlatinum average: $1,165.38, Ruthenium average: $150.59 - See more at: http://www.platinum.matthey.com/prices/price-charts#sthash.GMP3wwcI.dpuf