Monday, September 14, 2015

JVSTA Most Read Atomic Layer Deposition Articles Published in 2014


Journal of Vacuum Science &
Technology A Most Read Atomic Layer Deposition Articles Published in 2014
2.322
Impact  Factor 




Reactor concepts for atomic layer deposition on agitated particles: A review
Delphine Longrie, Davy Deduytsche and Christophe Detavernier
J. Vac. Sci. Technol. A 32, 010802 (2014) |  Read More
 
Roll-to-roll atomic layer deposition process for flexible electronics encapsulation applications
Philipp S. Maydannik, Tommi O. Kääriäinen, Kimmo Lahtinen, David C. Cameron, Mikko Söderlund, Pekka Soininen, Petri Johansson, Jurkka Kuusipalo, Lorenza Moro and Xianghui Zeng
J. Vac. Sci. Technol. A 32, 051603 (2014)| Read More
 
Low sheet resistance titanium nitride films by low-temperature plasma-enhanced atomic layer deposition using design of experiments methodology
Micheal Burke, Alan Blake, Ian M. Povey, Michael Schmidt, Nikolay Petkov, Patrick Carolan and Aidan J. Quinn
J. Vac. Sci. Technol. A 32, 031506 (2014) |  Read More
 
Analytic expressions for atomic layer deposition: Coverage, throughput, and materials utilization in cross-flow, particle coating, and spatial atom ic layer deposition
Angel Yanguas-Gil and Jeffrey W. Elam
J. Vac. Sci. Technol. A 32, 031504 (2014) |  Read More
 
Atmospheric pressure spatial atomic layer deposition web coating with in situ monitoring of film thickness
Alexander S. Yersak, Yung C. Lee, Joseph A. Spencer and Markus D. Groner
J. Vac. Sci. Technol. A 32, 01A130 (2014) |  Read More
 
In situ synchrotron based x-ray techniques as monitoring tools for atomic layer deposition
Kilian Devloo-Casier, Karl F. Ludwig, Christophe Detavernier and Jolien Dendooven
J. Vac. Sci. Technol. A 32, 010801 (2014) | Read More
 
Capacitance and conductance versus voltage characterization  of Al2O3 layers prepared by plasma enhanced atomic layer deposition at  25° C < T < 200°C
Karsten Henkel, Hassan Gargouri, Bernd Gruska, Michael Arens, Massimo Tallarida and Dieter Schmeißer
J. Vac. Sci. Technol. A 32, 01A107 (2014) | Read More

Hybrid inorganic-organic superlattice structures with atomic layer deposition/molecular layer deposition
Tommi Tynell, Hisao Yamauchi and Maarit Karppinen
J. Vac. Sci. Technol. A 32, 01A105 (2014)| Read More
 
Vibration atomic layer deposition for conformal nanoparticle coating
Suk Won Park, Jun Woo Kim, Hyung Jong Choi and Joon Hyung Shim
J. Vac. Sci. Technol. A 32, 01A115 (2014) |  Read More
 
Selective atomic layer deposition of zirconia on copper patterned silicon substrates using ethanol as oxygen source as well as copper reductant
Sathees Kannan Selvaraj, Jaya Parulekar and Christos G. Takoudis
J. Vac. Sci. Technol. A 32, 010601 (2014)| Read More