Tuesday, May 12, 2015

Ultra fast real-time monitoring of ALD by Ellipsometry with 1.25 Hz sampling rate

Here is a really cool paper from Marcel Junige and his co-workers at TU Dresden IHM and collaborators showing high resolution of the half reactions in ALD and real good sampling rate. Even the fastest of them all the half reaction of TMA is sampled in-situ showing the a bunch of sampling points from the steep saturation curve. Woah - only ALD Lab Dresden can pull of a thing like this!

You can connect with Marcel on Research Gate and get a free copy!
Marcel Junige, Varun Sharma, Ralf Tanner, Daniel Schmidt, Greg Pribil, Matthias Albert, Mathias Schubert, Johann W. Bartha
2015 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN), Dresden, Germany; 04/2015

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