Wednesday, March 14, 2018

Recent metal oxide ALD publications in JVSTA for free download

Here is a list of recent ALD Papers published in JVSTA on the topic of metal oxides. The best of all The following articles are free to download for next 30 days!

Source: JVSTA News Letter



High-k oxides by atomic layer deposition - Applications in biology and medicine
Marek Godlewski, Sylwia Gierałtowska, Łukasz Wachnicki, Rafał Pietuszka, Bartłomiej S. Witkowski, Anna Słońska, Zdzisław Gajewski, and Michał M. Godlewski | Read More

Toward plasma enhanced atomic layer deposition of oxides on graphene: Understanding plasma effects
Christie J. Trimble, Trevor Van Engelhoven, Anna M. Zaniewski, Manpuneet K. Benipal, and Robert J. Nemanich | Read More
 
Al2O3/SiOnanolaminate for a gate oxide in a GaN-based MOS device
Daigo Kikuta (菊田大悟 ), Kenji Itoh (伊藤健治 ), Tetsuo Narita (成田哲生 ), and Tomohiko Mori (森朋彦 ) | Read More

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties
Oili M. E. Ylivaara, Lauri Kilpi, Xuwen Liu, Sakari Sintonen, Saima Ali, Mikko Laitinen, Jaakko Julin, Eero Haimi, Timo Sajavaara, Harri Lipsanen, Simo-Pekka Hannula, Helena Ronkainen, and Riikka L. Puurunen | Read More

Atomic layer deposition of tin oxide thin films from bis[bis(trimethylsilyl)amino]tin(II) with ozone and water
Jere Tupala, Marianna Kemell, Miika Mattinen, Kristoffer Meinander, Sanni Seppälä, Timo Hatanpää, Jyrki Räisänen, Mikko Ritala and Markku Leskelä | Read More

Atomic layer deposition of molybdenum oxide using bis(tert-butylimido)bis(dimethylamido) molybdenum
Adam Bertuch, Ganesh Sundaram, Mark Saly, Daniel Moser, and Ravi Kanjolia | Read More

Spatial atomic layer deposition on flexible porous substrates: ZnO on anodic aluminum oxide films and Al2O3 on Li ion battery electrodes
Kashish Sharma, Dmitri Routkevitch, Natalia Varaksa, and and Steven M. George | Read More