EQP for the analysis of positive and negative ions, neutrals, and radicals from plasma processes
The Hiden Analytical EQP system is a combined mass spectrometer and energy analyser for
the analysis plasma ions, neutrals and neutral radicals. The EQP
instrument includes operating modes for positive ion, and negative ion
analysis. Threshold ionization and electron attachment ionization modes
are available for detailed neutral radical studies, for analysis of both
electro-positive and electro-negative plasma radicals.