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"A comprehensive, well-proven reference work on state-of-the-art MEMS materials, technologies and manufacturing, emphasizing current and future applications" with an ALD Chapter by Riikka Puurunen and Matti Putkonen.
Handbook of Silicon Based MEMS Materials and Technologies, 2nd Edition
Editor(s) : Lindroos, Motooka, Franssila, Paulasto-Krockel, Tilli & Airaksinen
Expected Release Date:05 Nov 2015
Imprint:William Andrew
Print Book ISBN :9780323299657
eBook ISBN :9780323312233
Expected Release Date:05 Nov 2015
Imprint:William Andrew
Print Book ISBN :9780323299657
eBook ISBN :9780323312233
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