Saturday, November 17, 2018

ALD at SEMICON Europa 2018

This year was the first time in a long time that we did not organize an ALD Symposium at SEMICON Europa. We decided to keep it as a Dresden event and it will be held 10th of December (LINK) followed by a visit to the famous Dresden Christmas market..

This year, I was invited together with a number of other ALD people to present at the Materials session in the Tech Arena and there was a great program with impressive presentations chaired by Johan Dekoster from Imec.


Materials Technology

Chair Johan Dekoster, Program Manager, imec
15:00 Introduction
15:05 New conductors – What are the options for N5, N3 and beyond?
Marleen van der Veen, Senior Scientist Nanointerconnects Metallization, imec
15:30 ALD/CVD applications, equipment and precursors in high volume manufacturing
Jonas Sundqvist, Group Leader, Fraunhofer IKTS
15:55 Advancing Atomic Layer Deposition and Atomic Layer Etching
Harm Knoops, Atomic Scale Segment Specialist, Oxford Instruments Plasma Technology
16:20 Atomic layer deposition for the synthesis and integration of 2D materials for nanoelectronics
Ageeth A. Bol, Associate Professor, Eindhoven University of Technology
16:45 Innovative Compound Semiconductor Based Engineered Substrates for Photonics, Power, Solar and RF Applications
Eric Guiot, Product Development Manager, Soitec
17:10 Kokusai Electric Corporation new products offering for 2018
Yoshio Kitahara, New Products offereing as Kokusai Electric, Kokusai Semiconductor Europe GmbH

Below here are some picture from the ALD Session, Exhibition and Show.

Heavy traffic on the Autobahn in to Munich - obviously more people are interested in ALD!

ICAM Engineering and Epivalence

Marleen van der Veen from Imec presenting on future metallization and tricks to densify logic further

Me and Harm Knoops from Oxford Instruments / TU Eindhoven enjoying the show.

Prof. Fred Roozeboom!

Prof. Johann Bartha asking tough questions.

Me presenting on ALD and CVD in HVM.

Harm Knoops presenting on ALD and ALE

Happy Beneq team presenting their new ALD Mini Batch ALD Cluster tool - Beneq C2

Veeco offering the new Firebird ALD Mini Batch Cluster tool.

Oxford Instruments (Photo from from Blog LINK)

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