Wednesday, November 16, 2016

Lam Research Tech brief on Atomic Layer Etching - ALE


Lam Research has just published a great Tech Brief covering Atomic Layer Etching on their Blog (Tech Brief: All About ALE ). Thanks Terry Francis for sharing this one!

The article covers the following:
  • Plasma Etch Basics
  • Plasma Etch Challenges
  • Atomic Layer Etching
  • Benefits of ALE
  • Growing Need for ALE

References