Lam Research has just published a great Tech Brief covering Atomic Layer Etching on their Blog (Tech Brief: All About ALE ). Thanks Terry Francis for sharing this one!
The article covers the following:
- Plasma Etch Basics
- Plasma Etch Challenges
- Atomic Layer Etching
- Benefits of ALE
- Growing Need for ALE
References
- Moving Atomic Layer Etch from Lab to Fab (Solid State Technology, 2013)
- Overview of Atomic Layer Etching in the Semiconductor Industry (J. Vac. Sci. Technol. A, 2015)
- Lam Research – Engineering at the Atomic Scale (video)
How do atomic-level processing techniques like #ALE make advanced chips possible? More on our blog: https://t.co/QVASFvgLfZ pic.twitter.com/oy8Qb4nSS2— LamResearch (@LamResearch) November 14, 2016
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