Ultratech CNT in Dublin at ALD2016 presenting latest work on Superconductivity, SAMS Area-Selective ALD (ASD), Molybdenum Nitride and product developments

The Platinum Sponsor, supporting over 450 ALD research systems worldwide, will bring its science team to the ALD conference to present latest work and discuss leading edge application developments with delegates. Available at booth #15 and presenting as follows.

Plasma enhanced atomic layer deposition of molybdenum nitride
Adam Bertuch*¹, Brent Keller², Ganesh Sundaram¹, Jeffrey Grossman^2
1Ultratech - Cambridge NanoTech, USA, ²Department of Material Science and Engineering, Massachusetts Institute of Technology, USATuesday 26 July:  Plasma-enhanced deposition and etching  -  Tuesday 26 July 15:45-17:15
16:30-16:45

Controlling smoothness of thin platinum ALD films
Ritwik Bhatia*¹, Ralf Heilmann², Alexander Bruccoleri³, Brandon Chalifoux^2
1Ultratech-Cambridge Nanotech, USA, ²Massachusetts Institute of Technology, USA, ³Izentis LLC, USAWednesday 27 JULY:  Noble metals  -  Wednesday 27 July 08:15-10:15
10:00-10:15

Novel method to achieve area selective ALD on copper metal vs. SiO2 using vapor-phase deposited SAMS
Laurent Lecordier*¹, Silvia Armini^2
1Ultratech Cambridge Nanotech, USA, ²Imec, BelgiumTuesday 26 July:  Nucleation and area selective deposition 1  -  Tuesday 26 July 11:00-12:30
11:00-11:15

Plasma enhanced atomic layer deposition of superconducting NbN films
Mark Sowa*¹, Yonas Yemane², J Provine³, Fritz Prinz^4
1Ultratech/CNT, USA, ²Stanford University, Department of Applied Physics, USA, ³Stanford University, Department of Electrical Engineering, USA, ⁴Stanford University, Department of Mechanical Engineering and Department of Materials Science and Engineering, USATuesday 26 July:  Poster session 2  -  Tuesday 26 July 17:15-19:00