Here is yet another update from Beneq on their new Spatial ALD technology: In November last year, we shared the first news about our new spatial ALD equipment
that works with moving sheet substrates. We also promised our dear
readers more information later about how we would make spatial ALD
bigger, faster and more flexible. Now we have been running pilots with
different materials for a couple of months, and it is time to keep that
promise and share more details.
Foll post can be found here on the Beneq Blog: http://www.beneq.com/blog/201602/size-matters-and-speed-too.html
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