Thursday, June 12, 2014

Webhosting for The Virtual Project on the History of ALD - VPHA

Webhosting for The Virtual Project on the History of ALD - VPHA - through BALD Engineering. The Virtual Project on the History of ALD is a worldwide collaborative effort, carried out in atmosphere of openness, respect and trust - anyone welcome to attend! Please check for future updates!

VPHA main links:

VPHA files

Other ALD history presentations/blog posts:

Malygin presentation [to be updated]


AVS ALD 2014 in Kyoto Japan - Tutorial & Workshop
June 15th 2014, Sunday
16:20-17:10 ALD History
by Riikka Puurunen, VTT, Finland

Poster Session
June 16th Monday, 18:00‐20:00
16P003 On the Early History of ALD: Molecular Layering
Riikka Puurunen et al., VTT Technical Research Centre of Finland, Finland

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