Tuesday, February 9, 2016

Update on Beneq Spatial ALD

Here is yet another update from Beneq on their new Spatial ALD technology: In November last year, we shared the first news about our new spatial ALD equipment that works with moving sheet substrates. We also promised our dear readers more information later about how we would make spatial ALD bigger, faster and more flexible. Now we have been running pilots with different materials for a couple of months, and it is time to keep that promise and share more details.

Foll post can be found here on the Beneq Blog: http://www.beneq.com/blog/201602/size-matters-and-speed-too.html