Thursday, April 16, 2015

Plasma ALD Hardware Histogram for 2014 Publications

Now it is here -  Plasma ALD Hardware Histogram for 2014 Publications by The Plasma-ALD Guy.


A histogram of the hardware used in plasma ALD publications accepted during 2014.
  • Publications included are those accepted for publication date as the criterion
  • To date, 124 publications using PEALD films accepted for publication during 2014. 
  • All the data for the histogram is from the plasma-ald.com publications database. 

#1 Cambridge NanoTech Fiji



#2 Oxford Instruments FlexAL

#2 BENEQ TFS-200