|
Showing posts with label ALD journal. Show all posts
Showing posts with label ALD journal. Show all posts
Saturday, January 23, 2016
Hurry up ALD & ALE People - These articles on Atomic Layer Processing have been made free to download for a limited time!
Hurry up ALD & ALE People - These articles on Atomic Layer Processing have been made free to download for a limited time!
Tuesday, January 5, 2016
JVSTA ALD & ALE issue is here!
JVSTA ALD & ALE issue is here - Goldig as they say in German!
Alexandra H. Brozena, Christopher J. Oldham and Gregory N. Parsons
J. Vac. Sci. Technol. A 34, 010801 (2016); http://dx.doi.org/10.1116/1.4938104
Review Articles
Atomic layer deposition on polymer fibers and fabrics for multifunctional and electronic textilesAlexandra H. Brozena, Christopher J. Oldham and Gregory N. Parsons
J. Vac. Sci. Technol. A 34, 010801 (2016); http://dx.doi.org/10.1116/1.4938104
Wednesday, November 11, 2015
Prof. Erwin Kessels TU Eindoven is appointed Associate Editor of the JVSTA
Professor W.M.M. (Erwin) Kessels of Eindhoven University of Technology Department of Applied Physics is appointed as an Associate Editor of the Journal of Vacuum Science & Technology(JVSTA). JVSTA has become a very important journal for ALD since it runs a special ALD issue after each International ALD conference. Here is a link to the upcoming issue : http://scitation.aip.org/upload/AVS/JVA/JVST_Special_Issue.pdf
Congratulations Erwin!
Biography
Erwin Kessels is a full professor at the Department of Applied Physics of the Eindhoven University of Technology TU/e (The Netherlands). He is also the scientific director of the NanoLab@TU/e facilities which provides open-access clean room infrastructure for R&D in nanotechnology. Erwin received his M.Sc. and Ph.D. degree (with highest honors) in Applied Physics from the TU/e in 1996 and 2000, respectively. His doctoral thesis work was partly carried out at the University of California Santa Barbara and as a postdoc he was affiliated to the Colorado State University and Philipps University in Marburg (Germany). In 2007 the American Vacuum Society awarded him the Peter Mark Memorial Award for "pioneering work in the application and development of in situ plasma and surface diagnostics to achieve a molecular understanding of thin film growth". From the Netherlands Organization of Scientific Research, he received a grant in 2010 to set up a large research program on "nanomanufacturing" in order to bridge the gap between nanoscience/nanotechnology and industrial application. His research interests cover the field of synthesis of ultrathin films and nanostructures using methods such as (plasma-enhanced) chemical vapor deposition (CVD) and atomic layer deposition (ALD) for a wide variety of applications, mostly within nanoelectronics and photovoltaics. Within the field of ALD, he has contributed to the field most prominently by his work on plasma-assisted ALD and his research related to ALD for photovoltaics. Erwinchaired the International Conference on Atomic Layer Deposition in 2008 and he has published over 200 papers and holds 2 patents.Tuesday, November 3, 2015
ALD Special issue for Novel Nanomaterials and Emerging Applications
Here is a new ALD Special issue for Novel Nanomaterials and Emerging Applications http://www.hindawi.com/journals/jnm/si/289520/cfp/
Atomic Layer Deposition (ALD) has been recognized as a very powerful and elegant tool for nanostructured materials, greatly widening its applications into more and more research areas, ranging from semiconductors to catalysis, optoelectronics, biomedical, gas sensing, resistant coating, clean energies (batteries, fuel cells, supercapacitors, solar cells, etc.), and nano- and microelectromechanical systems (N/MEMS). These are mainly ascribed to the ALD’s unique growth mechanism based on sequentially surface-controlled saturation reactions, consequentially enabling atomic-scale layer-by-layer material growth. As a result, ALD is exclusively capable of constructing both large-scale uniform planar nanofilms and conformal complex nanocoatings at low temperature. ALD’s distinguished characteristics also include superior controllability over material composition and crystallinity.
All the merits make ALD an important technique in seeking new technical solutions and conducting fundamental frontier research. In searching for new energies, for example, ALD enables us to dramatically improve the batteries’ stability, safety, and sustainable high energy by applying subnanoprotective coatings on battery electrodes. ALD has also been reported for cost-effective catalysts, biocompatible devices, superblack light-absorbing materials, solar cell passivation layers, ultralight but ultrastiff mechanical metamaterials, and so on. These new advances witness ever-growing applications of ALD and foresee a new era of ALD. With the increasing importance of ALD as a new nanotechnology route, more research efforts are urgently needed, including new ALD processes based on novel precursors, advanced characterization, novel nanostructures, emerging applications in various areas, and innovations on ALD systems.
The purpose of this special issue is to provide a research forum to exchange the latest outcomes with ALD for nanostructured materials and exploring potentials of ALD-resultant nanomaterials for future applications. This special issue is soliciting original high-quality research work that has not been published or that is not currently under review by other journals or peer-reviewed conferences. The special issue will publish communications, full articles, and review papers.
Potential topics include, but are not limited to:
Novel nanostructured materials by ALD
- Nanofilms, nanoparticles, and nanotubes
- 3D nanostructures
- Nanocomposites
- Biomedical and biocompatible coatings
- Clean energies (batteries, fuel cells, solar cells, supercapacitors, etc.)
- Catalysis
- N/MEMS
- Optoelectronics
- Resistant coatings
Authors can submit their manuscripts via the Manuscript Tracking System at http://mts.hindawi.com/submit/journals/jnm/ald/.
Manuscript Due Friday, 29 April 2016
First Round of Reviews Friday, 22 July 2016
Publication Date Friday, 16 September 2016
Lead Guest Editor
Xiangbo Meng, Argonne National Laboratory, Illinois, USA
Guest Editors
Xinwei Wang, Peking University, Shenzhen, China
Dongsheng Geng, Western University, London, Canada
Cagla Ozgit-Akgun, ASELSAN Inc., Ankara, Turkey
Nathanaelle Schneider, IRDEP (EDF/CNRS/Chimie ParisTech), Chatou, France
Monday, October 26, 2015
Atomic Layer Deposition (ALD) in Energy, Environment, and Sustainability
Atomic Layer Deposition (ALD) in Energy, Environment, and Sustainability
Figure. Schematic diagram of an ideal surface coating layer on active materials. Image provided by Xueliang Sun.
Guest Editors
Hongjin Fan, Nanyang Technological University, Singapore
Yongfeng Mei, Fudan University, China
Mato Knez, CIC nanoGUNE Research Center, Spain
Yongfeng Mei, Fudan University, China
Mato Knez, CIC nanoGUNE Research Center, Spain
Scope
The essential characteristics of an atomic layer deposition (ALD) reaction are the sequential self-limiting surface reactions to achieve conformal thin films with sub-monolayer thickness control. This advantage over other deposition processes renders a wide range of applications. While ALD was conventionally applied mainly in semiconductor electronic industry, recently, it is receiving increasing attention for wider applications in energy, environment, and sustainability research, with the advance in recipe development.
This focus collection will centre on the increasing importance of ALD techniques in developing innovative nanoscale materials, processes, devices, and systems relating to energy and environmental applications. Original and Review work detailing the development of energy nanomaterials and devices, including photovoltaics, batteries and supercapacitors, fuel cells, photocatalysts, and photoelectrochemical cells are solicited. Additionally developments in nanophotonics, including applications of ALD in new plasmonics, nanoscale laser, and metamaterials research are included. Interest of this collection also extends to innovations in chemical and biosensing using ALD, for example, organic pollution degradation, surface plasmon sensors, and quantum dot biomarkers.
The scope of this collection includes:
- Fabrication and synthesis
- Energy storage and conversion
- Micro and nano-photonics
- Sensor for environment and healthcare
- Devices integration and reliability
We hope this issue provides a broad overview of the current state and guidance to the future.
Invited reviews
Applications of atomic layer deposition in solar cellsOPEN ACCESSWenbin Niu, Xianglin Li, Siva Krishna Karuturi, Derrick Wenhui Fam, Hongjin Fan, Santosh Shrestha, Lydia Helena Wong and Alfred Iing Yoong Tok2015 Nanotechnology 26 064001
Elegant design of electrode and electrode/electrolyte interface in lithium-ion batteries by atomic layer depositionJian Liu and Xueliang Sun2015 Nanotechnology 26 024001
Viewpoints
Towards high-energy and durable lithium-ion batteries via atomic layer deposition: elegantly atomic-scale material design and surface modificationXiangbo Meng2015 Nanotechnology 26 020501
Papers
The effect of ALD-grown Al2O3 on the refractive index sensitivity of CVD gold-coated optical fiber sensorsDavid J Mandia, Wenjun Zhou, Matthew J Ward, Howie Joress, Jeffrey J Sims, Javier B Giorgi, Jacques Albert and Seán T Barry2015 Nanotechnology 26 434002
Extremely high efficient nanoreactor with Au@ZnO catalyst for photocatalysisChung-Yi Su, Tung-Han Yang, Vitaly Gurylev, Sheng-Hsin Huang, Jenn-Ming Wu and Tsong-Pyng Perng2015 Nanotechnology 26 394001
Highly photocatalytic TiO2 interconnected porous powder fabricated by sponge-templated atomic layer depositionShengqiang Pan, Yuting Zhao, Gaoshan Huang, Jiao Wang, Stefan Baunack, Thomas Gemming, Menglin Li, Lirong Zheng, Oliver G Schmidt and Yongfeng Mei2015 Nanotechnology 26 364001
Control of the initial growth in atomic layer deposition of Pt films by surface pretreatmentJung Joon Pyeon, Cheol Jin Cho, Seung-Hyub Baek, Chong-Yun Kang, Jin-Sang Kim, Doo Seok Jeong and Seong Keun Kim2015 Nanotechnology 26 304003
Three-dimensional SnO2@TiO2 double-shell nanotubes on carbon cloth as a flexible anode for lithium-ion batteriesHaifeng Zhang, Weina Ren and Chuanwei Cheng2015 Nanotechnology 26 274002
Deposition of uniform Pt nanoparticles with controllable size on TiO2-based nanowires by atomic layer deposition and their photocatalytic propertiesChih-Chieh Wang, Yang-Chih Hsueh, Chung-Yi Su, Chi-Chung Kei and Tsong-Pyng Perng2015 Nanotechnology 26 254002
In-situ atomic layer deposition of tri-methylaluminum and water on pristine single-crystal (In)GaAs surfaces: electronic and electric structuresT W Pi, Y H Lin, Y T Fanchiang, T H Chiang, C H Wei, Y C Lin, G K Wertheim, J Kwo and M Hong2015 Nanotechnology 26 164001
Pd nanoparticles on ZnO-passivated porous carbon by atomic layer deposition: an effective electrochemical catalyst for Li-O2 batteryXiangyi Luo, Mar Piernavieja-Hermida, Jun Lu, Tianpin Wu, Jianguo Wen, Yang Ren, Dean Miller, Zhigang Zak Fang, Yu Lei and Khalil Amine2015 Nanotechnology 26 164003
Inert ambient annealing effect on MANOS capacitor memory characteristicsNikolaos Nikolaou, Panagiotis Dimitrakis, Pascal Normand, Dimitrios Skarlatos, Konstantinos Giannakopoulos, Konstantina Mergia, Vassilios Ioannou-Sougleridis, Kaupo Kukli, Jaakko Niinistö, Kenichiro Mizohata, Mikko Ritala and Markku Leskelä2015 Nanotechnology 26 134004
Impact of the atomic layer deposition precursors diffusion on solid-state carbon nanotube based supercapacitors performancesGiuseppe Fiorentino, Sten Vollebregt, F D Tichelaar, Ryoichi Ishihara and Pasqualina M Sarro2015 Nanotechnology 26 064002
Deposition of ultra thin CuInS2 absorber layers by ALD for thin film solar cells at low temperature (down to 150 °C)Nathanaelle Schneider, Muriel Bouttemy, Pascal Genevée, Daniel Lincot and Frédérique Donsanti2015 Nanotechnology 26 054001
Photocatalytic activity and photocorrosion of atomic layer deposited ZnO ultrathin films for the degradation of methylene blueYan-Qiang Cao, Jun Chen, Hang Zhou, Lin Zhu, Xin Li, Zheng-Yi Cao, Di Wu and Ai-Dong Li2015 Nanotechnology 26 024002
Influence of the oxygen plasma parameters on the atomic layer deposition of titanium dioxideStephan Ratzsch, Ernst-Bernhard Kley, Andreas Tünnermann and Adriana Szeghalmi2015 Nanotechnology 26 024003
Gas sensing properties and p-type response of ALD TiO2 coated carbon nanotubesCatherine Marichy, Nicola Donato, Mariangela Latino, Marc Georg Willinger, Jean-Philippe Tessonnier, Giovanni Neri and Nicola Pinna2015 Nanotechnology 26 024004
Air-Stable flexible organic light-emitting diodes enabled by atomic layer depositionYuan-Yu Lin, Yi-Neng Chang, Ming-Hung Tseng, Ching-Chiun Wang and Feng-Yu Tsai2015 Nanotechnology 26 024005
Atomic-layer-deposition alumina induced carbon on porous NixCo1 − xO nanonets for enhanced pseudocapacitive and Li-ion storage performanceCao Guan, Yadong Wang, Margit Zacharias, John Wang and Hong Jin Fan2015 Nanotechnology 26 014001
Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer depositionHuan-Yu Shih, Ming-Chih Lin, Liang-Yih Chen and Miin-Jang Chen2015 Nanotechnology 26 014002
NiO/nanoporous graphene composites with excellent supercapacitive performance produced by atomic layer depositionCaiying Chen, Chaoqiu Chen, Peipei Huang, Feifei Duan, Shichao Zhao, Ping Li, Jinchuan Fan, Weiguo Song and Yong Qin2014 Nanotechnology 25 504001
Electrochemical synthesis of highly ordered nanowires with a rectangular cross section using an in-plane nanochannel arrayPhilip Sergelius, Josep M Montero Moreno, Wehid Rahimi, Martin Waleczek, Robert Zierold, Detlef Görlitz and Kornelius Nielsch2014 Nanotechnology 25 504002
Highly ordered and vertically oriented TiO2/Al2O3 nanotube electrodes for application in dye-sensitized solar cellsJae-Yup Kim, Kyeong-Hwan Lee, Junyoung Shin, Sun Ha Park, Jin Soo Kang, Kyu Seok Han, Myung Mo Sung, Nicola Pinna and Yung-Eun Sung2014 Nanotechnology 25 504003
Distinguishing plasmonic absorption modes by virtue of inversed architectures with tunable atomic-layer-deposited spacer layerYun Zhang, Kenan Zhang, Tianning Zhang, Yan Sun, Xin Chen and Ning Dai2014 Nanotechnology 25 504004
Cellulose nanofiber-templated three-dimension TiO2 hierarchical nanowire network for photoelectrochemical photoanodeZhaodong Li, Chunhua Yao, Fei Wang, Zhiyong Cai and Xudong Wang2014 Nanotechnology 25 504005
Spatial resolution in thin film deposition on silicon surfaces by combining silylation and UV/ozonolysisLei Guo and Francisco Zaera2014 Nanotechnology 25 504006
Atomic layer deposition of lithium phosphates as solid-state electrolytes for all-solid-state microbatteriesBiqiong Wang, Jian Liu, Qian Sun, Ruying Li, Tsun-Kong Sham and Xueliang Sun2014 Nanotechnology 25 504007
Nanostructured TiO2/carbon nanosheet hybrid electrode for high-rate thin-film lithium-ion batteriesS Moitzheim, C S Nimisha, Shaoren Deng, Daire J Cott, C Detavernier and P M Vereecken2014 Nanotechnology 25 504008
Monday, September 14, 2015
New ALD Book, Atomic Layer Deposition (ALD): Fundamentals, Characteristics and Industrial Applications
Here is a new ALD book edited by Jeannie Valdez Atomic Layer Deposition (ALD): Fundamentals, Characteristics and Industrial Applications to be published by Nova in the 4th quarter 2015.
Editors: Jeannie Valdez
Book Description:
Atomic layer deposition (ALD) is a thin film deposition technique used in the mass production of microelectronics. In this book, novel nonvolatile memory devices are discussed. The chapters examine the low-temperature fabrication process of single-crystal platinum non-thin films using plasma-enhanced atomic layer deposition (PEALD). A comprehensive review of ALD surface coatings for battery systems is provided, as well as a theoretical calculation on the mechanism of thermal and plasma-enhanced atomic layer deposition of SiO2; and fluorine doping behavior in Zn-based conducting oxide film grown by ALD. (Imprint: Nova)
Chapter 1
Atomic Layer Deposition for Novel Nonvolatile Memory Devices
(Ai-Dong Li, Department of Materials Science and Engineering, College of Engineering and Applied Sciences, National Laboratory of Solid State Microstructures, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, P. R. China)
Chapter 2
Platinum Nano- Thin Film for Plasmonic Photocatalytic Reaction
(Hung Ji Huang and Bo-Heng Liu, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan)
Chapter 3
Atomic Layer Deposition of Sub-Nano to Nanoscale Surface Coatings for Next-Generation Advanced Battery Systems
(Xiangbo Meng and Jeffrey W. Elam, Energy Systems Division, Argonne National Laboratory, Argonne, Illinois, USA)
Chapter 4
Theoretical Calculation on Mechanism of Thermal and Plasma-Enhanced Atomic Layer Deposition of SiO2
(Guo-Yong Fang, Li-Na Xu and Ai-Dong Li, National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, China)
Chapter 5
Fluorine Doping Behavior in Zn-Based Conducting Oxide Film Grown by Atomic Layer Deposition
(Hyung-Ho Park, Young-June Choi and Kyung-Mun Kang, Department of Materials Science and Engineering, Yonsei University, Seoul, Korea)
Index
Series:
Chemical Engineering Methods and Technology
Binding: Hardcover
Pub. Date: 2015 - 4th Quarter
Pages: 7x10 - (NBC-R)
ISBN: 978-1-63483-869-6
Status: AN
Editors: Jeannie Valdez
Book Description:
Atomic layer deposition (ALD) is a thin film deposition technique used in the mass production of microelectronics. In this book, novel nonvolatile memory devices are discussed. The chapters examine the low-temperature fabrication process of single-crystal platinum non-thin films using plasma-enhanced atomic layer deposition (PEALD). A comprehensive review of ALD surface coatings for battery systems is provided, as well as a theoretical calculation on the mechanism of thermal and plasma-enhanced atomic layer deposition of SiO2; and fluorine doping behavior in Zn-based conducting oxide film grown by ALD. (Imprint: Nova)
Table of Contents:
PrefaceChapter 1
Atomic Layer Deposition for Novel Nonvolatile Memory Devices
(Ai-Dong Li, Department of Materials Science and Engineering, College of Engineering and Applied Sciences, National Laboratory of Solid State Microstructures, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, P. R. China)
Chapter 2
Platinum Nano- Thin Film for Plasmonic Photocatalytic Reaction
(Hung Ji Huang and Bo-Heng Liu, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan)
Chapter 3
Atomic Layer Deposition of Sub-Nano to Nanoscale Surface Coatings for Next-Generation Advanced Battery Systems
(Xiangbo Meng and Jeffrey W. Elam, Energy Systems Division, Argonne National Laboratory, Argonne, Illinois, USA)
Chapter 4
Theoretical Calculation on Mechanism of Thermal and Plasma-Enhanced Atomic Layer Deposition of SiO2
(Guo-Yong Fang, Li-Na Xu and Ai-Dong Li, National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, China)
Chapter 5
Fluorine Doping Behavior in Zn-Based Conducting Oxide Film Grown by Atomic Layer Deposition
(Hyung-Ho Park, Young-June Choi and Kyung-Mun Kang, Department of Materials Science and Engineering, Yonsei University, Seoul, Korea)
Index
Series:
Chemical Engineering Methods and Technology
Binding: Hardcover
Pub. Date: 2015 - 4th Quarter
Pages: 7x10 - (NBC-R)
ISBN: 978-1-63483-869-6
Status: AN
JVSTA Most Read Atomic Layer Deposition Articles Published in 2014
|
|||||
|
Wednesday, August 26, 2015
JVSTA Issue on ALD Deadline Extended to: Septemeber 5, 2015
|
|||
|
|||
|
Subscribe to:
Posts (Atom)