ALD of High-k using molecular oxygen at Stanford Nanofabrication Facility

The Stanford Nanofabrication Facility (SNF) is administarting a fantastic Wiki for their clean room equipment and processeses in nanofabrication. The Wiki is there for the SNF lab community as a resource and also as historical archive as stated in the Wiki description. For all us not part of SNF it is nice that a login is not needed to view public information available.

In the wiki you will find vast process archives for the tools operated and for us ALD people the ALD section is especially interesting to study. As listed SNF is operating 4 ALD Tools all from Ultratech CNT : one Savannah and three Fiji´s.

SNF ALD Wiki  : LINK

SNF list of available films : LINK

Recently SNF published a great review of their metal alkyl amide High-k PEALD processes and the good news is that it is open source easily available for all of us to study.

 

Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursor

J Provine, Peter Schindler, Jan Torgersen, Hyo Jin Kim, Hans-Peter Karnthaler and Fritz B. Prinz

J. Vac. Sci. Technol. A 34, 01A138 (2016); http://dx.doi.org/10.1116/1.4937991