Growth and Transport in Nanostructured Materials
Reactive Transport in PVD, CVD, and ALD
Authors: Angel Yanguas-Gil, Northwestern-Argonne Inst. of Science and Engineering, Northwestern University, Evanston, Illinois, USA
This book will address the application of gas phase thin film methods,
including techniques such as evaporation, sputtering, CVD, and ALD to
the synthesis of materials on nanostructured and high aspect-ratio high
surface area materials. We have chosen to introduce these topics and the
different application fields from a chronological perspective: we start
with the early concepts of step coverage and later conformality in
semiconductor manufacturing, and how later on the range of application
branched out to include others such as energy storage, catalysis, and
more broadly nanomaterials synthesis. [Continue at Springer]
No comments:
Post a Comment