This is an announcement to the ALD Folks - please be informed that the hidden gem a.k.a. the good stuff or ALD precursors are reported on in the Yield Enhancement Report and the classical "ITRS Roadmap" can be found in the More Moor Report. Please carry on with the next Super High-k, GAA FETs and 2D Materials Research!
LINK:IEEE IRDS Roadmaps
Please also if you have input for the ALD precursor parts let me know and I will bring it up when some of us meet next time at the CMC Conference 11-12 May.
IRDS ReportsBelow are links to the downloadable whitepapers. Materials are to be shared among our industry friends. Thank you for citing the IRDS when using any materials!
This list will be updated as other IRDS whitepapers become available.
- Application Benchmarking (PDF, 326 KB)
- More Moore (PDF, 981 KB)
- Beyond CMOS (PDF, 335 KB)
- Outside System Connectivity (PDF, 235 KB)
- Factory Integration (PDF, 403 KB)
- Metrology (PDF, 184 KB)
- Environment, Health, and Safety (PDF, 535 KB)
- Yield (PDF, 571 KB)
- System and Architecture (Preliminary) (PDF, 206 KB)