Meyer Burger offer high-speed Spatial ALD Technology for R2R Production

Meyer Burger has updated their ALD Equipment offering and are now offering two ALD Products, one for R&D and one for Production. Both are based on Spatial ALD coating technology.

The FLEx S2S sALD

The FLEx S2S sALD is suit­able for ap­pli­ca­tion de­vel­op­ment that re­quire high speed ALD coat­ing tech­nol­ogy com­bined with ex­cel­lent uni­for­mity  (Source: Meyerburger.com)

The FLEx S2S sALD (sheet to sheet spa­tial ALD coat­ing so­lu­tion) is suit­able for ap­pli­ca­tion de­vel­op­ment that re­quire high speed ALD coat­ing tech­nol­ogy com­bined with ex­cel­lent uni­for­mity. The de­vel­oped process is trans­ferrable to the FLEx R2R sALD (roll to roll spa­tial ALD coat­ing so­lu­tion) in­dus­trial Equip­ment.

Main advantages

• Grow rates > 1 nm/s; 100 times compared to conventional ALD
• Flexibility in substrate material and layer thickness
• No pinholes
• Thickness control on atomic scale
• No gas phase reaction. No parasitic deposition
• Excellent conformity
• High application potential in flexible electronics, photovoltaics, OLED
• No vacuum process, process at atmospheric pressure
• Compact footprint

FLEx R2R sALD'

The FLEx R2R sALD is a full scale machine for high speed production on foil.

The FLEx R2R sALD is a ALD piece of pro­duc­tion equip­ment for the de­po­si­tion of thin R2R films