Here are a lot of interesting presentation available for free download: https://spcc2016.com/downloads/
The Surface Preparation and Cleaning Conference (SPCC) 2016
The Surface Preparation and Cleaning Conference (SPCC) is an annual
event which brings together prominent researchers from the semiconductor
industry and the university community to focus on developments and
challenges in advanced wafer and mask cleaning and surface preparation
technologies.
Join industry experts from around the globe representing IC
manufacturers, suppliers, and research organizations to present and
discuss the industry’s best available data on wafer, mask and part
cleaning technologies and solutions:
- Wafer front-end
- Wafer back-end
- Post CMP
- Packaging
- Advanced mask
- Equipment and parts
- Environment, safety and health issues
My favorites:
INVITED: Electron beam generated plasmas: Ultra cold sources for low damage, atomic layer processing — Scott Walton, Naval Research Lab
Selectivity in Atomic Layer Etching Using Sequential, Self-Limiting Thermal Reactions — Steve George, Univ. of CO
Novel Reactive Chemistry Sources for Surface Passivation of Future Generation Channel Materials — Dan Alvarez, Rasirc
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