Saturday, November 28, 2020

SAMCO launch ALD system for MEMS and SiC and GaN power devices

Samco just released an open-load ALD system "AL-1" with a focus on gate insulator formation of GaN and SiC powerdevices, passivation layer deposition, as well as the MEMS field. This report shows the AL-1's system specifications and several pieces of performance data.

Report: Atomic Layer Deposition (ALD) System for Power Device Applications LINK


  1. This post makes it appear as if this product has launched now. According to Samco and others, it was in 2015. Please correct? E.g.

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