Saturday, November 28, 2020

SAMCO launch ALD system for MEMS and SiC and GaN power devices

Samco just released an open-load ALD system "AL-1" with a focus on gate insulator formation of GaN and SiC powerdevices, passivation layer deposition, as well as the MEMS field. This report shows the AL-1's system specifications and several pieces of performance data.

Report: Atomic Layer Deposition (ALD) System for Power Device Applications LINK



2 comments:

  1. This post makes it appear as if this product has launched now. According to Samco and others, it was in 2015. Please correct? E.g. http://www.semiconductor-today.com/news_items/2015/dec/samco_181215.shtml

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