As reported by ACS (LINK) New, concise method proposed for conformal chemical vapor deposition using sacrificial layers (SLs). SLs are porous membranes that filter high sticking-probability species, while allow the passage of low ones.
This is a really clever by researchers at University of Tokyo and IHI Corporation for CVD to compete with ALD on conformality and keeping a high deposition rate and at the same time produce bulk material like SiC on Si for larger wafer diameter.
Figure from ACS Twitter post (LINK)
Reference:
Porous Membranes as Sacrificial Layers Enabling Conformal Chemical Vapor Deposition Involving Multiple Film-Forming Species
Kohei Shima, Yuichi Funato, Noboru Sato, Yasuyuki Fukushima, Takeshi Momose, and Yukihiro Shimogaki
ACS Appl. Mater. Interfaces 2020, 12, 45, 51016–51025
Publication Date:October 30, 2020
https://doi.org/10.1021/acsami.0c14069
Nice & Informative Blog !
ReplyDeleteIn case you face any technical issue in QuickBooks, call us at QuickBooks Customer Service 1-855-974-6537 and get instant solutions for QuickBooks problems.
I am glad that I found this website , exactly the right information that I was searching for! . you can purchase links from marketing1on1
ReplyDeleteThank u for the research u provided here. I found this piece of material a great one for reaction essay topics
ReplyDelete