Take away from the lecture:
- Problems where simulations can help:
- How to increase radical density using process parameters like pressure, gas flow etc
- How to optimise surface to enhance presence of radicals
- Importance of having a minimal chemistry set but including all important species
- How to start with plasma chemistry design and modelling using www.quantemolDB.com website and free tools
This video was recorded for Workshop Plasma Enhanced Atomic Layer Etch/Atomic Layer Deposition at 73rd Annual Gaseous Electronics Virtual Conference, October 5–9, 2020;
The conference link is here: https://meetings.aps.org/Meeting/GEC2...
The slides can be downloaded here: http://www.quantemol.com/wordpress/wp...
Sign up for www.quantemolDB.com to get started. The chemistry tutorial can be downloaded here: http://www.quantemol.com/wordpress/wp...
This is interesting for my H2 chemistry students.
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