Tuesday, November 17, 2020

AICHE 2020: Machine Learning-Based Modeling and Operation of PEALD of HfO2 Thin-Films

Here some insights from a presentation at AICHE 2020 by Yichi Zhang at UCLA entitled Machine Learning-Based Modeling and Operation of PEALD of HfO2 Thin-Films. The modelling is based on a 300 mm ASM Emerald PEALD chamber.



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