For more than 15 years now (since 2004, Samsung 90 nm DRAM) Atomic Layer Deposition (ALD) processing is keeping the advanced chips manufacturable, ensures performance and scaling, and pushing cost down for the consumer. Guess what - now we want to do the same by applying Atomic Layer Etching (ALE) into the leading edge Logic and Memory nanopatterning process flow - helping lithography keeping the overall cost down for you the consumer.
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