Thursday, February 14, 2019

The new ASM XP8 QCM up to 16 chamber ALD/CVD tool

Here is a photo out of a Korean web page of the new massive ASM XP8 QCM. Q stands for quad meaning the central wafer vacuum handler can dock 4 chambers per slot or "just" two as earlier on the XP8 up to 16 chamber ALD/CVD tool [LINK].

ASM International enhances ALD productivity with new 300 mm XP8 Quad Chamber Module [LINK]





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