Epitaxial deposition and process equipment maker Veeco Instruments Inc
of Plainview, NY, USA says that Osram Opto Semiconductors GmbH of
Regensburg, Germany has ordered a multi-reactor Propel High-Volume
Manufacturing (HVM) gallium nitride (GaN) metal-organic chemical vapor
deposition (MOCVD) system, as well as K475i MOCVD systems.
The K475i system incorporates Veeco’s Uniform FlowFlange technology,
producing films with very high uniformity and improved within-wafer and
wafer-to-wafer repeatability with what is claimed to be the industry’s
lowest particle generation for demanding applications like photonics
and advanced LEDs.
Source: Semiconductor Today LINK
Incorporating
proprietary TurboDisc and Uniform FlowFlange™ MOCVD technologies, the
new K475i system enables Veeco customers to reduce LED cost per wafer by
up to 20 percent compared to alternative systems through higher
productivity, best-in-class yields and reduced operating expenses. (Source: Veeco LINK)
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