JVST
A is Soliciting Research Articles for Publication in a Special
January/February 2017 Issue on Atomic Layer Deposition and Atomic Layer
Etching
Submission Deadline: September 6, 2016
These special issues are planned in collaboration with
ALD 2016 Conference and the ALE Workshop being held in Dublin, Ireland, during July 24-27, 2016. The
Special Issues will be dedicated to the science and technology of atomic
layer controlled deposition of thin films. While a significant fraction
of the articles expected are to be based on material presented at ALD
2016 and the ALE Workshop, research articles that are on ALD and ALE but
not presented at this conference are also welcome: the special issue
will be open to all articles on the science and technology of ALD and
ALE.
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