Tokyo Electron recently (APR 25, 2018) presented their Q1/2018 numbers to share holders and released a slide deck (LINK) with some interesting new numbers on market share. For the first time it seems that another OEM is up there seriously challenging ASM International on the No.1 spot in ALD Equipment market share. ASM International has dominated the ALD segment with a share of >70% in 2014, but this share has slipped down year by year and they have lost their market share to well below 50% in 2017 due to strong competition in a rapidly expanding ALD market from Tokyo Electron, Lam Research, Kokusai, The Korean OEMs (Jusung Engineering, Wonik IPS and Eugene Technology) and also to some extent by Applied Materials.
According to the latest estimate based on Gartner research (released April 18, 2018), Tokyo Electron as of 2017 holds a 31% total market share of ALD wafer based processing equipment. That should include all wafer based ALD platforms, however some companies hide their ALD revenue in the CVD segments so you can not know for sure if you don´t know the data in detail. The segments are:
- ALD Tube - Large batch furnaces, typically loading 100 or more wafers
- Single wafer platforms
- Multi wafer platforms, spatial or multi station
TEL Market share for 2017, Based on Gartner research (TEL Q1/2018 Earnings call slide deck)
One explanation why Tokyo Electron has taken market share in ALD is because of a lot of the recent investment is coming from DRAM and 3DNAND Fabs and not Logic Fabs (see below). Traditionally Tokyo Electron has been much stronger in Memory than ASM International. Here the Japanese have very attractive tools for commodity product manufacturing (DRAM and Flash memory chips) like their ALD Large Batch Furnaces and relatively new and successful NT333 Spatial ALD platforms.
TEL sales their FY 2016 to 2018 by segment (TEL Q1/2018 Earnings call slide deck)
Also interesting is that Tokyo Electron presents a rather bright future with growth not only in DRAM and 3DNAND but also in Logic due to 10/7nm investments from the IDMs and Foundries.