The HPR-30 is a residual gas analyser configured for analysis of gases
and vapours in vacuum processes and for vacuum diagnostics.
The HPR-30 sampling system configuration is for fast response high
sensitivity analysis of gas and vapour species in vacuum processes. It is
also directly suited to analysis of high mass species and precursors
used in ALD and MOCVD applications.
The HPR-30 system features a close-coupled re-entrant aperture for
sampling directly within the process region, providing maximum data
integrity and fast confirmation of process status. Options include the
innovative Hiden 3F series triple filter quadrupole system providing
enhanced abundance sensitivity, part-per-billion (ppb) detection levels
and high contamination resistance, particularly suited to the analysis
of aggressive gases in CVD and RIE applications.
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